Fixed-Structure, Low-Order Damping and Tracking Control Schemes for Nanopositioning

AA Eielsen, M Vagia, JT Gravdahl, and KY Pettersen. Fixed-Structure, Low-Order Damping and Tracking Control Schemes for Nanopositioning. 5th IFAC Symposium on Mechatronic Systems, In Proceedings of the, Hangzhou, China, 2013.

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